@proceedings {20174,
	title = {Surface analysis and process optimization of black silicon},
	journal = {Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on},
	year = {2012},
	pages = {567-570},
	publisher = {IEEE},
	isbn = {1467311243},
	author = {Zhu, Fu-Yun and Di, Qian-Li and Zeng, Xing-Juan and Zhang, Xiao-Sheng and Xin Zhao and Zhang, Hai-Xia}
}
