@article {20170,
	title = {Investigation of silicon/glass anodic bonding with PECVD silicon carbide as the intermediate layer},
	journal = {Journal of Micromechanics and Microengineering},
	volume = {22},
	year = {2012},
	pages = {095011},
	publisher = {IOP Publishing},
	isbn = {0960-1317},
	author = {Tang, W and Meng, B and W. Su and Zhang, H. X.}
}
