@proceedings {20162,
	title = {Switchable wetting \& flexible SiC thin film with nanostructures},
	journal = {Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS \&amp; EUROSENSORS XXVII), 2013 Transducers \&amp; Eurosensors XXVII: The 17th International Conference on},
	year = {2013},
	pages = {230-233},
	publisher = {IEEE},
	isbn = {1467359831},
	author = {Zhang, XS and Meng, B and Zhu, FY and Tang, W and Zhang, H. X.}
}
