@article {20155,
	title = {Microstructure and magnetic properties of micro NiFe alloy arrays for MEMS application},
	journal = {Journal of Micromechanics and Microengineering},
	volume = {23},
	year = {2013},
	pages = {085013},
	publisher = {IOP Publishing},
	isbn = {0960-1317},
	author = {Li, Zhongliang and Sun, Xuming and Zheng, Yang and Zhang, Haixia}
}
