@proceedings {20137,
	title = {A three-step model of black silicon formation in deep reactive ion etching process},
	journal = {Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on},
	year = {2015},
	pages = {365-368},
	publisher = {IEEE},
	isbn = {1479979554},
	author = {Zhu, FuYun and Chen Wang and Zhang, Xiaosheng and Xin Zhao and Zhang, Haixia}
}
