@proceedings {20135,
	title = {Wafer-level fabrication of a triboelectric energy harvester},
	journal = {Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on},
	year = {2015},
	pages = {1078-1081},
	publisher = {IEEE},
	isbn = {1479979554},
	author = {Han, Mengdi and Yu, Bocheng and Su, Zongming and Meng, Bo and Cheng, Xiao Liang and Zhang, Xiao-Sheng and Zhang, Haixia}
}
