@article {20131,
	title = {Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures},
	journal = {Microelectronic Engineering},
	volume = {141},
	year = {2015},
	pages = {72-80},
	publisher = {Elsevier},
	isbn = {0167-9317},
	author = {Zhang, Xiao-Sheng and Su, Zong-Ming and Han, Meng-Di and Meng, Bo and Zhu, Fu-Yun and Zhang, Hai-Xia}
}
