@article {20129,
	title = {Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF 6/C 4 F 8},
	journal = {Science China Technological Sciences},
	volume = {58},
	year = {2015},
	pages = {381-389},
	publisher = {Springer},
	isbn = {1674-7321},
	author = {Zhu, FuYun and Zhang, Xiaosheng and Zhang, Haixia}
}
