@proceedings {20121,
	title = {A flexible and wearable generator with fluorocarbon plasma induced wrinkle structure},
	journal = {Micro Electro Mechanical Systems (MEMS), 2016 IEEE 29th International Conference on},
	year = {2016},
	pages = {1181-1184},
	publisher = {IEEE},
	isbn = {1509019731},
	author = {Cheng, Xiao Liang and Chen, Xuexian and Meng, Bo and Han, Mengdi and Shi, Mayue and Chen, Haotian and Yu Song and Zhang, Haixia}
}
